Edwards STP-iXA3306CV - StartStop Procedures After Events

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 50
INSTALLATION
3
3.9.2 Configuration of the STP pump with the TMS
Figure 29 shows wiring and piping of two-way valve type. Refer to Figure 30 for wiring and piping of
three-way valve type.
1.
STP pump
5.
TMS heater cable
2.
TMS heater (Built-in)
6.
TMS valve cable
3.
TMS valve
7.
Power cable
4.
Control unit
Figure 29 - Configuration of the TMS
5
4
7
1
3
2
6