Edwards STP-H301 Series User Manual

MT-00E-001-M
D
Applicable Models:
◼ STP-301/451 series
◼ STP-L301/L451 series
◼ STP-603/1003 series
◼ STP-H301/H451 series
◼ STP-H803/H1303 series
◼ STP-A803/A1303 series
◼ STP-A1603 series
◼ STP-A2203 series
◼ STP-A2503/A3003 series
◼ STP-A2803/A3503 series
◼ STP-F2203 series
◼ STP-XH2603P/XH3203P series
◼ STP-XA2703/XA3203 series
◼ STP-XA4503 series
◼ STP-XW3503 series
STP Series Turbomolecular Pumps
Generic Instruction Manual
Instruction Manual (A)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
2023.08

Edwards STP-H301 Series Specifications

General

Brand	Edwards
Model	STP-H301 Series
Category	Water Pump
Language	English

Summary

Introduction to STP Series Turbomolecular Pumps

Safe Operation Precautions

Details essential safety measures and warnings for operating the STP pump.

Maintenance and Inspection Precautions

Installation of the STP Pump

Precautions Before Installation

Unpacking the STP Pump

Covers procedures for safely unpacking the STP pump and checking for damage.

How to Install the STP Pump

Guides the user through the process of physically installing the STP pump.

Installation of the STP Control Unit

STP Control Unit Overview

Cable Connections for STP System

Connecting STP System Cables

Provides detailed instructions and safety precautions for connecting all cables.

STP Pump Operation Procedures

Pre-Operation Checks

Outlines essential checks and procedures before initial STP pump startup.

Pump Operation and Indicators

Details how to operate the pump and interpret status indicators.

Gas Pumping, Cooling, and Baking

Covers procedures for gas handling, cooling, and baking operations.

Pump Cooling Methods

Baking the STP Pump

Using the Temperature Management System (TMS)

STP Pump Safety Functions and Error Handling

Overview of Safety Functions

Introduces the pump's built-in safety features and error handling procedures.

Power Failure and Recovery Procedures

Magnetic Bearing and Vibration Issues

Details issues related to magnetic bearing function and excessive vibration.

Motor Overload and Overheating

Overspeed and TMS Unit Errors

Describes pump response to overspeed and errors within the TMS unit.

Control Unit Fan Failure

Maintenance and Inspection Procedures

General Maintenance and Inspection Guidelines

Provides general safety warnings and guidelines for maintenance tasks.

Cleaning the STP Pump

Inspecting for Internal Deposits

Recommended Maintenance Schedules

Transporting for Repair or Overhaul