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Edwards STP Series User Manual

Edwards STP Series
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MT-79E-001-D
STP Series Turbomolecular Pumps
STP-iXR1606
(Issue 1-d)
Instruction Manual
Copyright 2014 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
July
2014
Original Instructions

Table of Contents

Questions and Answers:

Edwards STP Series Specifications

General IconGeneral
BrandEdwards
ModelSTP Series
CategoryWater Pump
LanguageEnglish

Summary

INTRODUCTION

Scope and definitions

Defines the manual's scope and terminology for the STP pump.

Applied standards

Lists directives and standards the STP pump conforms to.

Limited warranty

Details the warranty terms and conditions for the STP pump.

Disclaimer

Outlines exclusions and limitations of the manufacturer's warranty.

Precautions for safe operation

Provides essential safety guidelines for operating the STP pump.

Maintenance and inspection precautions

Details precautions to be taken during maintenance and inspection.

Labels

Describes the warning and instruction labels affixed to the pump.

Operation principle

Explains how the STP pump operates using magnetic levitation.

STP pump specification

Lists the physical and performance specifications of the STP pump.

TECHNICAL DATA

STP pump specifications

Presents typical values for flange size, speed, pressure, and noise.

Maximum gas flow-rate

Details the gas pumping rates under various cooling water conditions.

Water cooling use condition

Specifies the required conditions for cooling water.

Control unit

Lists electrical and interface specifications for the control unit.

External appearance of the STP pump

Shows diagrams and dimensions of the STP pump's external features.

Label affixing positions

Illustrates where labels are located on the STP pump.

INSTALLATION OF THE STP PUMP

Precautions before installation

Outlines essential precautions and personnel requirements for installation.

Operating environment

Specifies environmental conditions required for STP pump installation.

Installation area

Details the space requirements for installation, maintenance, and cabling.

Bench

Provides guidance on preparing a suitable bench for pump installation.

Insulation test

Advises on performing insulation tests on connected equipment.

Unpacking and installation

Guides the user through unpacking and initial installation procedures.

Name and function of each part

Identifies and describes the main components of the STP pump.

Name and function of the control unit

Details the front panel components and their functions on the control unit.

How to install the STP pump

Provides step-by-step instructions for installing the pump into vacuum equipment.

Cleaning the seal

Explains the procedure for cleaning pump seals before installation.

STP pump installation positions

Describes acceptable installation orientations for the STP pump.

Secure the STP pump

Details methods for securely mounting the STP pump, including torque values.

Legs for securing the base

Specifies screw hole positions and bolt requirements for base securing.

Power cable

Describes the power cable requirements and connection details.

How to connect the power cable

Provides detailed instructions for connecting the power cable safely.

Precautions of vacuum piping

Outlines critical precautions for vacuum piping connections.

Vacuum piping method

Details the correct method for connecting vacuum piping.

Introducing N2 gas (for the STP pump equipped with purge port)

Explains the use of N2 gas for pump protection and thermal management.

Connecting the water cooling pipe

Provides instructions and precautions for connecting the water cooling system.

Attaching a baking heater

Describes how to install a baking heater for temperature control.

Connecting to semiconductor equipment

Details connections for semiconductor equipment integration.

Connecting to power

Specifies power connection requirements for semiconductor systems.

Emergency off circuit (EMO circuit)

Explains the integration and operation of the Emergency Off circuit.

OPERATION

Gas pumping, cooling and baking the STP pump

Covers the fundamental operations of gas handling, cooling, and baking.

Gas pumping

Details the procedures and safety precautions for gas pumping.

How to introduce a purge gas

Explains the process of introducing purge gas for pump protection.

Cooling the STP pump

Emphasizes the importance of cooling and describes the water-cooling method.

Baking the STP pump

Describes the process and precautions for baking the STP pump.

Before starting the STP pump

Outlines checks and confirmations required before starting the pump.

Powering ON

Instructions for turning on the STP pump and initial status indication.

Pump operation

Covers general pump operation procedures.

Starting/stopping the STP pump

Explains methods for starting and stopping the pump using contact inputs.

How to start/stop the STP pump

Details the procedures for starting and stopping the pump.

LED

Describes the meaning and indication of the pump's status LEDs.

Parallel port input/output signal

Details the use of parallel port signals for remote control.

Rotation INHIBIT signal

Explains the function and usage of the rotation inhibit signal.

Second speed option

Describes how to configure and use the second speed option.

Output signal pins

Details the output signals available from the pump for monitoring.

SERIAL COMMUNICATION PROTOCOL

Introduction

Introduces the RS232/RS485 serial communication interface.

Connection and setting up

Guides on connecting and configuring serial ports COM1 and COM2.

Signal connection

Details pin assignments and connection procedures for serial ports.

Connecting the RS485

Explains RS485 connection methods, including single-point and multi-point.

Communication parameter setting

Lists factory and PC settings for communication parameters.

Input operation port setting

Describes how to set the input operation port for serial communication.

Serial communication timeout setting

Explains how to configure serial communication timeout settings.

Recommended items about communication cable installation

Provides recommendations for installing communication cables to prevent noise.

Protocol specifications

Outlines the general structure and rules of the serial communication protocol.

Standard transmission frame (in the RS232/RS485 single point connection)

Defines the standard frame format for single-point RS232/RS485 communication.

Control command (in the RS232/RS485 single point connection)

Details the format and usage of control commands for pump operation.

Query command (in the RS232/RS485 single point connection)

Explains how to issue query commands to retrieve pump status.

Frame control (checksum)

Describes the frame control mechanisms, including checksum calculation.

Error control

Explains the error handling procedures for communication.

Command list

A comprehensive list of available commands for pump control and querying.

ReadMeas

Command to read the measured rotational speed of the pump.

Command

Commands for controlling pump operation (START, STOP, RESET).

ReadFailMess

Command to read detected error messages from the pump.

ReadModFonct

Command to read pump operation mode and detected errors.

ReadVersion

Command to retrieve software version information.

ReadCounters

Command to read serial number, hour counter, and start counter.

ReadSetPoint

Command to read speed set point and TMS temperature.

ReadMotorTemp

Command to read the measured motor temperature.

ReadStatus

Command to read various operational settings like remote mode and TMS function.

ReadEvents

Command to read the pump's error record history.

SetSpeedSetPoint

Command to change the pump's speed set point.

ReadSpeedSetPoint

Command to read the current speed set point.

ReadModFonctWithWarning

Command to read pump mode, errors, and warnings.

ReadOptionFunc

Command to read settings for optional functions.

SetOptionFunc

Command to change settings for optional functions.

ReadCondition

Command to read pump model and damage point information.

ReadEventsWithTime

Command to read error records with associated detection time.

SetOptions

Command to change settings for optional functions like second speed.

ReadOptions

Command to read the settings of optional functions.

STP-LINK and DISPLAY UNIT

STP-Link

Describes the STP-Link Windows application for pump operation and configuration.

Display unit

Details the iDT-001 display unit for pump operation and status monitoring.

SAFETY FUNCTIONS

Safety functions

Overview of the pump's safety features for abnormalities and errors.

Power Failure

Explains how the pump behaves during a power failure, including backup operation.

Operation after a power recovery

Procedures for restarting the pump after a power interruption.

Abnormal state of magnetic bearing (Disturbance)

Describes issues related to magnetic bearing function and potential failures.

Excessive vibration (Disturbance)

Explains pump behavior when experiencing excessive vibration.

Overspeed

Details the safety function that triggers upon exceeding the rated speed.

"WARNING" function

Describes warnings indicating the need for maintenance or self-test.

Contents of WARNING function

Details specific warning conditions like damage limits and overload.

WARNING function setting

Explains how to enable or disable warning functions and adjust thresholds.

Troubleshooting immediately after failure occurs

Guides on immediate actions to take after a pump failure.

Troubleshooting

General troubleshooting procedures and error indications.

Indication of "FAILURE" LED (red)

Explains the meaning of red FAILURE LED indications and associated actions.

No Indication of the "FAILURE" LED

Troubleshooting steps when the FAILURE LED does not illuminate.

MAINTENANCE AND INSPECTION

Maintenance and inspection

General guidelines and safety precautions for performing maintenance.

Cleaning

Describes the procedures for cleaning the STP pump and its components.

Inspecting the deposit

Explains how to inspect for and address deposit accumulation inside the pump.

Maintenance

Covers general maintenance practices.

Recommended overhaul intervals

Provides recommended service intervals based on application type.

Recommended maintenance intervals for main parts

Lists recommended replacement intervals for key pump components.

Transporting for repair or overhaul

Outlines procedures and precautions for shipping the pump for service.

STORAGE AND DISPOSAL

Storage of the STP pump

Provides instructions and precautions for storing the STP pump long-term.

Disposal

Explains the proper procedures for disposing of the STP pump as industrial waste.

SERVICE, SPARES AND ACCESSORIES

Introduction

Introduces the availability of Edwards products, spares, and accessories.

Service

Details the global service network and available service options.

Spares

Information on obtaining spare parts, particularly touch down bearings.

Accessories

Lists available accessories for the STP pump, such as manuals and cables.