Edwards STP Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 11
TECHNICAL DATA
2
2 TECHNICAL DATA
2.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item STP-iXR1606
Flange size Inlet port flange VG200 / VG250
ISO200F / ISO250F
ICF253 / ICF305
VG150 / ISO160F
ICF203
Outlet port flange KF40
Pumping speed N
2
L/s 1600 1000
H
2
L/s 1200 800
Compression ratio N
2
>10
8
H
2
1×10
3
Ultimate pressure Pa (Torr) 10
-
7
(10
-
9
) [after baking]
Allowable backing pressure Pa (Torr) 266 (2)
Rated speed rpm 36,500
Backup rotational speed
*
1
rpm Approximately 8,000
Starting time min
≦8
Stopping time min
≦9
Noise dB < 55 (at 36,500 rpm)
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Mass
*
2
kg 48
Ambient temperature range °C 0 to 40
Storage temperature range °C -5 to 55
*1
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*2
Mass is a value of state that the only standard accessory was installed (except the optional accessory).

Edwards STP Series Specifications

General

Brand	Edwards
Model	STP Series
Category	Water Pump
Language	English