STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 65
4
Pin Description
Pins for outputting the POWER ON state signal.
These pins are closed when magnetic bearing functions and
the rotor levitates.
This output is opened at a power failure
Pins for outputting the ACCELERATION state signal.
These pins are closed when the STP pump is in acceleration.
Pins for outputting the NORMAL OPERATION state signal.
When the STP pump is in rated operation, the pins between
(11)-(30) are closed, and the pins between (12)-(30) are
opened.
Pins for outputting the BRAKE state signal.
These pins are closed when the STP pump is in brake.
Pins for outputting the FAILURE signal.
When an abnormality/error is detected, the pins between
(14)-(33) are closed, and the pins between (15)-(33) are
opened.
Pins for outputting the WARNING signal.
These pins are closed when the STP pump is WARNING state.
Refer to Section 7.2, "Safety Functions" for the warning.
Pins for outputting the parallel port select state signal.
When the input operation port is set to the parallel port (I/O
REMOTE), the pins are closed.
Pins for the TMS unit rated state signal output.
When the actual temperature of the TMS unit is within the
setting temperature range ±10°C, the pins between (16)-(17)
are closed and the pins between (35)-(17) are opened.
Table 17 - X2 REMOTE output signal pins
(9) (28)
POWER
N.O OUT
(10) (29)
ACCELERATION
N.O OUT
(11) N.O OUT
(12) N.C OUT
NORMAL
COM
(30)
(13) (32)
BRAKE
N.O OUT
(14) N.O OUT
(15) N.C OUT
FAILURE
COM
(33)
(24) N.O OUT
(25) N.C OUT
WARNING
COM
(6)
(34) (31)
I/O ENABLE
N.O OUT
(16) N.O OUT
(35) N.C OUT
AT TEMP
COM
(17)
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