Edwards STP Series

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 12
TECHNICAL DATA
PAG
E
12
2
2.2 Maximum gas flow-rate
*1
Cooling
water
Gas
Purge gas
flow rate
*2
Back pump
> 1,300 L/min > 10,000 L/min
To 25 ºC N
2
Pa·m
3
/s (SCCM)
N/A
4.05 (2400) 7.94 (4700)
Ar Pa·m
3
/s (SCCM)
1.52
(900)
1.69
(1000)
To 35 ºC N
2
Pa·m
3
/s (SCCM)
4.05 (2400) 7.94 (4700)
Ar Pa·m
3
/s (SCCM) 1.18 (700) 1.35 (800)
To 25 ºC N
2
Pa·m
3
/s (SCCM)
8.4×10
-2
±1.7×10
-2
(50±10)
4.05 (2400) 7.94 (4700)
Ar Pa·m
3
/s (SCCM) 2.70 (1600)
3.04
(1800)
To 35 ºC N
2
Pa·m
3
/s (SCCM)
4.05 (2400) 7.94 (4700)
Ar Pa·m
3
/s (SCCM) 2.19 (1300) 2.53 (1500)
*1
The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously. It is changed
depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas
flow-rate can be exhausted. In this case, contact Edwards.
*2
Use the STP pump with purge ports (optional accessory) when introduce a purge gas. Refer to Section 3.6, "Introducing N2
gas (for the STP pump equipped with purge port) " for the connection method of purge ports.