Edwards STP Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
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PAGE
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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 3
1.3.1 Warranty period 3
1.3.2 Item warranted 3
1.3.3 Disclaimer 4
1.3.4 Spare parts 4
1.4 Precautions for safe operation of the STP pump 5
1.4.1 Usable gases 5
1.5 Maintenance and inspection precautions 6
1.6 Labels 6
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 11
2.1 STP pump specifications 11
2.2 Maximum gas flow-rate 12
2.3 Water cooling use condition 13
2.4 Control unit 14
2.5 External appearance of the STP pump 16
2.6 Label affixing positions 17
3 INSTALLATION OF THE STP PUMP 19
3.1 Precautions before installation 19
3.1.1 Operating environment 19
3.1.2 Installation area 21
3.1.3 Bench 22
3.1.4 Insulation test 22
3.2 Unpacking and installation 23
3.3 Name and function of each part 27
3.3.1 Name and function of the pump 27
3.3.2 Name and function of the control unit 28
3.4 How to install the STP pump 31
3.4.1 Cleaning the seal 32
3.4.2 STP pump installation positions 33
3.4.3 Secure the STP pump 34
3.4.4 Legs for securing the base 38
3.4.5 Power cable 39
3.4.6 How to connect the power cable 41
3.5 Precautions of vacuum piping 43
3.5.1 Vacuum piping method 44
3.6 Introducing N
2
gas
(for the STP pump equipped with purge port) 44
3.7 Connecting the water cooling pipe 45
3.8 Attaching a baking heater 46

Edwards STP Series Specifications

General

Brand	Edwards
Model	STP Series
Category	Water Pump
Language	English