Edwards STP Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page ii
PAGE
ii
CONTENTS (CONTINUED)
Section Title Page
3.9 Connecting to semiconductor equipment 47
3.9.1 Connecting to power 47
3.9.2 Emergency off circuit (EMO circuit) 47
4 OPERATION 49
4.1 Gas pumping, cooling and baking the STP pump 49
4.1.1 Gas pumping 49
4.1.2 How to introduce a purge gas 50
4.2 Cooling the STP pump 50
4.2.1 Water-cooling method 50
4.3 Baking the STP pump 51
4.4 Before starting the STP pump 52
4.4.1 Confirmation before starting 52
4.4.2 Confirmation of vacuum system 52
4.5 Powering ON 53
4.6 Pump operation 53
4.6.1 Input operation port setting 53
4.6.2 Starting/stopping the STP pump 54
4.7 How to start/stop the STP pump 55
4.7.1 Starting the STP pump after stopping 55
4.7.2 Starting the STP pump after a safety function operates 55
4.7.3 Powering OFF 55
4.8 LED 56
4.9 Parallel port input/output signal 57
4.9.1 Input signal pins 57
4.9.2 Input operation port setting 61
4.9.3 Rotation INHIBIT signal 62
4.9.4 Second speed option 63
4.9.5 Output signal pins 64
5 SERIAL COMMUNICATION PROTOCOL 69
5.1 Introduction 69
5.2 Connection and setting up 70
5.2.1 Signal connection 70
5.2.2 Connecting the RS485 72
5.2.3 Communication parameter setting 73
5.2.4 Input operation port setting 74
5.2.5 Serial communication timeout setting 75
5.2.6 Recommended items about communication cable installation 76
5.3 Protocol specifications 79
5.3.1 General description 79
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 80
5.3.3 Control command
(in the RS232/RS485 single point connection) 81
5.3.4 Query command
(in the RS232/RS485 single point connection) 82

Edwards STP Series Specifications

General

Brand	Edwards
Model	STP Series
Category	Water Pump
Language	English