STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 151
MAINTENANCE AND INSPECTION
8
8.4 Maintenance
8.4.1 Recommended overhaul intervals
Regular overhaul (the cost of overhaul will be at your own charge) is required for safety and proper
use of STP pump.
The recommended intervals for different process applications are tabulated below:
Process Intervals Remarks
Etching
Metal etch process
(deposition)
1 year Processes resulting in large amount of deposits in
the pump will require more frequent service
(includes non-etching process).
Other etch process 2 years
Other semiconductor process 2 years
Clean application 5 years No gases used (only vacuum pumping)
Other use 2 years Dependent on application, contact Edwards.
*1
"Etching" includes semiconductor etching and LCD etching.
Note: When "First Damage Limit" warning or "Second Damage Limit" warning is detected, it is
essential to have the touch down bearings replaced regardless of the recommended
overhaul intervals. Warning detection is indicated by flashing of "FAILURE" LED (3 flashes in
orange), a message on the display unit iDT-001 (optional accessory) or the STP-Link
(optional accessory).
8.4.2 Standard replacement parts
When overhauling pumps, upper and lower touch down bearing, O-rings, dehumidifying agent (IP54
specification only) will be replaced as standard replacement parts.
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