STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 49
4
4 OPERATION
4.1 Gas pumping, cooling and baking the STP pump
Installation, operation and maintenance must only be executed by personnel who read through this
Manual carefully and have the specific skills to perform installation, operation and maintenance of the
STP pump.
4.1.1 Gas pumping
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
When using pyrophoric gas, keep MSDS and a safety advice of gas supplier.
WARNING
When pumping gases, they may remain in the STP pump. Exhaust all gases. Residual
gases can cause an accident if/when the pump is removed. Take measures according
to MSDS to prevent an accident when using toxic, reactive or combustible gases.
CAUTION
The STP-iXR1606 is non-corrosion resistant type. Therefore, it cannot use the following gases
including chlorine and fluorine system gases.
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
CAUTION
The STP-iXR1606 is non-corrosion resistant type. Therefore, the use of corrosive gases and active
gases (radical gases) may damage Advanced Composite Materials (ACM) used in the part of rotor.
Note that the costs for repair of the product will be at the customer's own charge.
CAUTION
Install cables so that personnel are not exposed to risk of tripping or falling.
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