EasyManua.ls Logo

Edwards STP Series

Edwards STP Series
169 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 28
INSTALLATION
3
3.3.2 Name and function of the control unit
Figure 16 shows the front panel of the control unit.
WARNING
A hazardous live voltage may exist at the connectors that are marked with the
warning sign . DO NOT touch the connecter. Doing so may result in electric
shock. When connecting/disconnecting the connecter, always power off the primary
power (switch the MAIN POWER to "OFF") and isolate (Lockout/Tagout) the
electrical energy source, water and gas, and other energy sources on the vacuum
equipment.
1 "POWER" LED 7 "AC POWER" connector (X1)
2 "FAILURE" LED 8 "COM2" connector (X4)
3 "ROTATION" LED 9 "Data" LED
4 "COM1" connector (X3) 10 "Off-Line" LED
5 "STP-LINK" connector (X5) 11 "Error" LED
6 "MAIN POWER" switch 12 "REMOTE" connector (X2)
Figure 16 - Control unit (Front panel)
Note: Refer to Table 4, Table 5 for front panel functions.
4
6 7
1
0
1
11
5
12
8
9
3
2

Table of Contents

Related product manuals