STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 19
INSTALLATION
3
3 INSTALLATION OF THE STP PUMP
3.1 Precautions before installation
Installation, operation and maintenance must only be executed by personnel who read through this
Manual carefully and have the specific skills to perform installation, operation and maintenance of the
STP pump.
3.1.1 Operating environment
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
MSDS and a safety advice of gas supplier.
WARNING
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused
by exhaust gas.
CAUTION
The STP-iXR1606 is non-corrosion resistant type. Therefore, it cannot use the following gases
including chlorine and fluorine system gases.
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
CAUTION
The STP-iXR1606 is non-corrosion resistant type. Therefore, the use of corrosive gases and active
gases (radical gases) may damage Advanced Composite Materials (ACM) used in the part of rotor.
Note that the costs for repair of the product will be at the customer's own charge.
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