STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 20
INSTALLATION
3
The STP pump should be installed in an area which meets the following requirements:
Ambient temperature 0 to 40 °C (32 to 104 °F)
Ambient relative humidity 30 to 95% (no dew condensing)
Environment
An area free of externally applied mechanical shock.
A place free of a heat source (Keep clear of the heat
source or attach a thermal shield plate).
A place free of a strong magnetic field (Range: up to 15
mT (150 G) in the axial direction, and up to 3 mT (30 G) in
the radial direction with respect to the rotational axis of the
STP pump).
A place free of a strong electric field.
A place free of exposure to radiation.
No discharge of high voltage (more than 500 V) (If more
than 500 V is discharged, contact Edwards).
Others: An area free of exposure to direct sunlight, high
humidity, salty air, explosive or flammable gas, corrosive
gas, excessive vibration and sources of electric noise.
Dust and splashing water should be within the
specification of protection classification IP54.
*1
STP pump installation
equipment conditions
Install the STP pump securely so that foreign materials
cannot fall into the STP pump (Ex.: Si wafers or samples are
positioned above the STP pump) (To prevent foreign
materials from falling into the STP pump, design a shield
plate with large conductance).
Install the STP pump so that the inlet flange of the STP
pump not to be exposed to heat source. (Install the heat
shield plate so as to prevent the effect by radiation heat)
Good example:
Heat shield plate
Bad example:
None
*1 Refer to IEC60529-2001 for IP Ratings.
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