Edwards STP Series

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 100
5
SERIAL COMMUNICATION PROTOCOL
Pump operation mode Value
Levitation 1
No Levitation 2
Acceleration 3
Normal 4
Deceleration (Brake) 5
Autotest 6
[System Reservation] 7
[System Reservation] 8
[System Reservation] 9
[System Reservation] 10
[System Reservation] 11
Table 30 - Pump operation mode
Example:
Pump operation mode : 01
hex
= 1 = Levitation
The number of error : 02
hex
= 2 errors
Error 1 : 0D
hex
= 13 = Disturbance Xh
Error 2 : 0F
hex
= 15 = Disturbance Xb
Error 3 to 80 : 00
hex
= No error detected
Parameter 1 2 3 4 5 6 7 8 9 10 11
ASCII 0 1 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 0 0 0 0
HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30
Parameter 12 13
[Omitted]
68 69 70 71 72 73 74 75
ASCII 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0
HEX 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30
Parameter 76 77 78 79 80 81 82
ASCII 0 0 0 0 0 0 0 0 0 0 0 0 0 0
HEX 30 30 30 30 30 30 30 30 30 30 30 30 30 30