STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 16
TECHNICAL DATA
PAG
E
2
2.5 External appearance of the STP pump
Inlet
port flange
VG150 VG200 VG250 ISO160F ISO200F ISO250F ICF203 ICF253 ICF305
φA
235 300 350 225 285
335 203 253 305
φB
237 237 237 237 237
237 237 237 237
C 15 16 16 15 16 16 22 25 28
D
420 380 380 420 380
380 420 418 380
φE
210 270 320 200 260
310 181 231.8 284
F 22.5º 22.5º 15º 22.5º 15º 15º 9 º 7.5º 5.625 º
G
8-φ12 8-φ15 12-φ15 8-φ11 12-φ11 12-φ11 20-φ8.4 24-φ8.4 32-φ8.4
H 313 273 273 313 273 273 313 311 273
I 263 223 223 263 223 223 263 261 223
Figure 7 - External appearance of STP-iXR1606
No. Item Description
1 Height of water
cooling port
Rc1/4
2 Control unit
3 Outlet port flange KF40
4 Screw hole for
securing the base
4-M8
Depth 20