STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 150
MAINTENANCE AND INSPECTION
8
8.2 Cleaning
The method for cleaning the STP pump is as follows:
ï‚· Clean the outside of the STP pump with proper solvent as required. An alcohol solvent can be
used.
ï‚· Clean off with a pure gas when dust has accumulated in the connector.
ï‚· Clean the outside of the control unit with a dry wipe as required.
ï‚· If the label of the STP pump has been damaged, contact Edwards.
The decontamination (overhaul) in the STP pump is executed in Service office. When an overhaul is
needed, contact Service office.
8.3 Inspecting the deposit
CAUTION
Leaving the STP pump without removing the deposit may cause the STP pump to be corroded
beyond repair.
Deposit may have accumulated inside the STP pump depending upon the type of the vacuum
equipment installed in the STP pump. An increase in the amount of deposit may lead to a
malfunction of the STP pump.
Therefore, perform regular maintenance (once every three to six months as a target).
Inspect the inside of the outlet port for adhesion of deposit while watching the outlet port. If deposit
has accumulated to some extent, an overhaul (cleaning) is required. Contact Service office.
Note: The costs of troubleshooting problems resulting from deposit will be at your own charge even
during the warranty period.
If a problem resulting from deposit occurs inside the STP pump, hermetically seal the inlet port, outlet
port, purge port, leak port flanges, ventilation port of the control unit, and immediately return them to
Service office.
For the transport method, see Section 8.5, "Transporting for repair or overhaul".
Contact with the atmosphere may cause a reaction of the deposit. DO NOT open the STP pump to
the atmosphere.
Edwards can supply a Temperature Management System (TMS) unit which will keep the temperature
high inside the STP pump and prevent the accumulation of deposit. For details, contact Edwards.
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