STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 152
MAINTENANCE AND INSPECTION
8
8.4.3 Recommended maintenance intervals for main parts
Internal components of the STP pump will be damaged from gas load, heat, and corrosion when
used long-term. Deterioration or abrasion of the internal parts of the STP pump will cause
unexpected failures. When overhauling the STP pump, replacement of main parts are recommended.
Refer to the following list as recommended maintenance intervals for main parts.
Part name
Recommended maintenance intervals
Corrosive gas
Inert gas or
vacuum pumping only
Rotor blades 3 years 5 years
Rotor shaft 3 years 5 years
Motor, sensor, electromagnet,
connector
5 years 7 years
Air-cooling fan 5 years
PCBA in the control unit 7 years
Accessories TMS valve 3 years
TMS heater 3 years
Connection cable 5 years
*1: Maintenance intervals of any parts may be shortened depending on the condition of use.
The costs of replacing parts that need to be replaced when deterioration or abrasion is observed will
be at the customers charge, even though a period is not exceeding the recommended maintenance
intervals.
When overhaul of the STP pump is needed, contact Service office.
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