STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 5
INTRODUCTION
1
1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
The STP-iXR1606 is non-corrosion resistant type. Therefore, it cannot use the following gases
including chlorine and fluorine system gases.
Gases including alkaline metals except Li gas.
Gases including Ga, Hg, In, or Sn.
HBr gas.
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
Warn of the danger of the gas with the warning label when the use gas is hazardous
chemical material.
WARNING
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
CAUTION
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
CAUTION
Introduce a dry N
2
gas (purge gas) to protect the inside of the STP pump when using gases
including hydrogen. The use of these gases may result in product damage.
CAUTION
The STP-iXR1606 is non-corrosion resistant type. Therefore, the use of corrosive gases and active
gases (radical gases) may damage Advanced Composite Materials (ACM) used in the part of rotor.
Note that the costs for repair of the product will be at the customer's own charge.
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