Edwards STP Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 8
INTRODUCTION
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1.7 Operation principle of the STP pump
Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat panel,
solar battery.
The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The STP-iXR1606 pump is a magnetically-levitated turbomolecular pumps, each with the following
features:
1. Oil free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
5. Dust and water protection
1. Rotor blade 4. Radial electromagnet
7. Touch down bearing
2. Stator blade 5. Axial sensor 8.
Control unit
3. Radial sensor 6. Axial electromagnet
Figure 6 - Cross sectional view of the STP pump
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Edwards STP Series Specifications

General

Brand	Edwards
Model	STP Series
Category	Water Pump
Language	English