Edwards STP-iXA3306CV - Error Message Values

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 107
5
SERIAL C
OMMUNICATION PROTOCO
L
Error message
Value
Error message
Value
Ram Error
0
AMB Com. Failure
33
[System reservation]
1
[System reservation]
34
TMS Higher Temp
2
TMS Sensor Lost
35
[System reservation]
3
[System reservation]
36
[System reservation]
4
[System reservation]
37
Power Failure
5
[System reservation]
38
Power Supply Fail
6
[System reservation]
39
Overspeed 1
7
[System reservation]
40
DRV Overvoltage
8
[System reservation]
41
[System reservation]
9
[System reservation]
42
CNT Overheat 1
10
WARNING: Imbalance X_H
43
*1
DRV Overcurrent
11
WARNING: Imbalance X_B
44
*1
DRV Overload
12
WARNING: Imbalance Z
45
*1
Disturbance X_H
13
[System reservation]
46
Disturbance Y_H
14
[System reservation]
47
Disturbance X_B
15
[System reservation]
48
Disturbance Y_B
16
[System reservation]
49
Disturbance Z
17
Driver Failure
50
MOTOR Overheat
18
[System reservation]
51
[System reservation]
19
[System reservation]
52
CNT Overheat 2
20
[System reservation]
53
[System reservation]
21
[System reservation]
54
[System reservation]
22
[System reservation]
55
[System reservation]
23
[System reservation]
56
DRV Com. Failure
24
[System reservation]
57
WARNING: 1
st
Damage Limit
25
*1
[System reservation]
58
2
nd
Damage Limit
26
Acc Malfunction
59
[System reservation]
27
[System reservation]
60
Speed Pulse Lost
28
[System reservation]
61
Overspeed 2
29
[System reservation]
62
Overspeed 3
30
[System reservation]
63
M_Temp Lost
31
[System reservation]
64
TMS Lower Temp
32
[System reservation]
65
Table 36 - Error message values