Edwards STP-iS2207 Series User Manual

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 45
INSTALLATION
3
3.5.1 Vacuum piping method
1. Attach the inlet port to the high vacuum side.
(Refer to Section 2.1, "STP pump specification" for maximum working pressure).
2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
(Refer to Section 2.1, "STP pump specification" for allowable backing pressure).
Note: Maximum flow for water cooled is applicable under the condition listed in Section 2.3, "Water
cooling use condition".
3.6 Introducing N
2
gas (for the STP pump equipped with purge port)
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
2
gas or other gas
into the STP pump in order to protect the inside of the STP pump. To isolate (Lockout/Tagout) the
purge gas N
2
, introduce a dry N
2
gas through the electromagnetic vent. valve, needle valve or similar
valve (must be prepared by the customer) from the purge port.
When exhausting a gas which has low heat conductivity such as Ar gas, the temperature of rotor
blade will increase. Introduce a dry N
2
gas into the STP pump through the purge port in order to
decrease the temperature of rotor blade and exhaust the large amount of Ar gas.
For instructions on how to introduce the purge gas, see Section 4.1.2.
h Height of purge port
Inlet port
flange
VG250 / ISO250F
VG200 / ISO200F
ICF253
ICF305
h 266 311 291
Figure 26 - Height of purge port

Edwards STP-iS2207 Series Specifications

General

Brand	Edwards
Model	STP-iS2207 Series
Category	Water Pump
Language	English