STP-iS2207 Series Turbomolecular Pump 
 
MT-89E-001-C
Page 88 
5
SERIAL COMMUNICATION PROTOCOL 
  Always check the LRC checksum of answer data. When LRC checksum is incorrect, do not use 
the  data.  When  the  incorrect  data  caused  by  noise  is  accepted,  parameters  might  be  set 
unexpected  values.  In  this  case,  the  processing  of  the  tool  application  may  determine  to  be  a 
communication  failure.  When  LRC  checksum  is  incorrect,  receive  the  answer  data  again 
according to the following methods. 
    - Send "NAK" within 1500 msec after receiving the answer data, and then receive the answer 
data again from SIM. However, when using RS485, send "NAK" at least 1 msec has passed 
after receiving the answer data. 
    - Stop once the communication process, and try the communication process again. 
 
PC 
SIM 
ACK 
Reply (A)
Answer 
Reply (A) 
Command
Send (A) 
NAK 
Send (A)
Answer 
Reply (A) 
NCK 
Send (A)
Answer 
Reply (A) 
ACK 
Send (A)
The answer resending process by NAK sent   
correct value. 
 
Figure 44 - Example of answer resending process 
  When sending the following command after receiving the answer data from the SIM, the following 
command will be disabled. 
 
PC 
SIM 
ACK 
Reply (A)
Command
Send (A) 
Command
Send (B) 
Answer 
Reply (A) 
ACK 
Send (A)
The following command will be disabled
 
Figure 45 - Example of response when the command is sent continuously 
In addition, when using RS485, do not send commands while the answer data is sent from the 
SIM. The crosstalk of sending data and receiving data will occur,  and it causes communication 
failure such as a flaming error. 
PC 
SIM 
ACK 
Reply (A)
Answer 
Reply (A) 
Command
Send (A) 
Command
Send (B) 
When using RS485, the crosstalk is happened
next command is sent during an answer data reply.
crosstalk
 
Figure 46 - Example of command sending during answer data reply