Edwards STP-iS2207 Series - Name and Function of each Part; Name and Function of the Pump; Configuration of the STP Pump; Control Unit (Front Panel)

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 27
INSTALLATION
3
3.3 Name and function of each part
3.3.1 Name and function of the pump
The STP pump in Figure 16 is a typical pump model. Refer to Section 2, "TECHNICAL DATA".
Figure 16 - Configuration of the STP pump
Item Description Function
1 Inlet port flange Connected to the vacuum equipment (at the high vacuum side).
2 Outlet port flange Connected to the inlet port side of the backing-pump.
3 Cooling water port Connected to the STP pump cooling water pipe.
4 Control unit Contains the electronics that control the pump. Refer to Section
3.3.2, "Name and function of the control unit, for details.
5 Purge port
(only specification with
purge port)
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gas, gas including hydrogen.
The STP pump is delivered with a blank flange attached to this
port.
Table 3 - Pump functions