STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 35
INSTALLATION
3
3.4.3 Secure the STP pump
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
The method of securing the STP pump will depend on the STP pump model and its installation
requirements. Secure the STP pump to the vacuum equipment according to the method specified in
this manual.
The STP pump is a component system when installing to the semiconductor equipment. Consider
the following when installing to the semiconductor equipment.
Confirm that electric resistance value between the STP pump and vacuum equipment is set to
0.1 Ω or less after securing the STP pump to the vacuum equipment.
The generated torque during a pump failure is called "Destructive torque". Design and secure the
mounting for the STP pump so that it can withstand the maximum rotational torque. Refer to Table 7
for torque in pump abnormality.
This will depend on the type of STP pump. Refer to Table 6 for torque tightening the bolts used.
Bolt size Tightening torque (Nm)
M8 12
M10 24
M12 42
Table 6 - Tightening torque of bolt
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
The pump cannot be used with claw clamps fixed.
Note: When using any securing method other than that specified in this manual, contact Edwards.
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