Edwards STP-iS2207 Series User Manual

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 12
TECHNICAL DATA
PAG
E
12
2
2.2 Maximum gas flow-rate
*1
Cooling
water
Gas
Purge gas
flow rate
*2
Back pump
> 1,300 L/min > 5,500 L/min > 10,000 L/min
To 25 ºC N
2
Pa·m
3
/s
(SCCM)
N/A
2.20
(1300)
4.06
(2400)
5.41
(3200)
Ar
Pa·m
3
/s
(SCCM)
1.18
(700)
1.35
(800)
1.35
(800)
To 35 ºC N
2
Pa·m
3
/s
(SCCM)
2.20
(1300)
4.06
(2400)
5.24
(3100)
Ar
Pa·m
3
/s
(SCCM)
0.85
(500)
1.01
(600)
1.01
(600)
To 25 ºC N
2
Pa·m
3
/s
(SCCM)
8.4×10
-2
±1.7×10
-2
(50±10)
2.20
(1300)
4.06
(2400)
5.41
(3200)
Ar
Pa·m
3
/s
(SCCM)
1.18
(700)
1.69
(1000)
1.69
(1000)
To 35 ºC N
2
Pa·m
3
/s
(SCCM)
2.20
(1300)
4.06
(2400)
5.24
(3100)
Ar
Pa·m
3
/s
(SCCM)
1.01
(600)
1.35
(800)
1.35
(800)
*1
The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously. It is changed
depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas
flow-rate can be exhausted. In this case, contact Edwards.
*2
Use the STP pump with purge ports (optional accessory) when introduce a purge gas. Refer to Section 3.6, "Introducing N2
gas (for the STP pump equipped with purge port) " for the connection method of purge ports.

Edwards STP-iS2207 Series Specifications

General

Brand	Edwards
Model	STP-iS2207 Series
Category	Water Pump
Language	English