Edwards STP-iS2207 Series - 1.4 Precautions for safe operation of the STP pump

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page iii
PAGE
iii
CONTENTS (CONTINUED)
Section Title Page
5.3.7 Error control 82
5.3.8 Transmission frame in the RS485 multi-point connection 82
5.3.9 Control command in the RS485 multi-point connection 84
5.3.10 Query command in the RS485 multi-point connection 85
5.3.11 Broadcasting command in the RS485 multi-point connection 86
5.3.12 Application note 87
5.4 Command specifications 91
5.4.1 Command list 91
5.4.2 ReadMeas 92
5.4.3 Command 92
5.4.4 ReadFailMess 93
5.4.5 ReadModFonct 97
5.4.6 ReadVersion 99
5.4.7 ReadCounters 100
5.4.8 ReadSetPoint 101
5.4.9 ReadMotorTemp 101
5.4.10 ReadStatus 102
5.4.11 ReadEvents 103
5.4.12 SetSpeedSetPoint 104
5.4.13 ReadSpeedSetPoint 105
5.4.14 ReadModFonctWithWarning 106
5.4.15 ReadMeasValue 109
5.4.16 ReadOptionFunc 111
5.4.17 SetOptionFunc 114
5.4.18 ReadCondition 116
5.4.19 ReadEventsWithTime 118
5.4.20 SetOptions 122
5.4.20.1 Second speed option setting 122
5.4.20.2 Second speed selection 123
5.4.21 ReadOptions 124
5.4.21.1 Second speed function setting 124
5.4.21.2 Second speed select 125