Edwards STP-iS2207 Series - 1.5 Maintenance and inspection precautions

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page iv
PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
6 STP-LINK AND DISPLAY UNIT 127
6.1 STP-Link 127
6.2 Display unit 128
7 SAFETY FUNCTIONS 129
7.1 Safety functions 129
7.1.1 Power Failure 129
7.1.2 Operation after a power recovery 130
7.1.3 Abnormal state of magnetic bearing (Disturbance) 131
7.1.4 Excessive vibration (Disturbance) 131
7.1.5 Motor driver overload (DRV Overload) 131
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 131
7.1.7 Overheating inside the control unit (CNT Overheat) 131
7.1.8 Overspeed 132
7.2 "WARNING" function 132
7.2.1 "WARNING" function 132
7.3 Contents of WARNING function 134
7.3.1 First Damage limit 134
7.3.2 Second Damage Limit 134
7.3.3 Pump run time over 134
7.3.4 Pump Overload 135
7.3.5 Imbalance 135
7.3.6 Other Warning 135
7.4 WARNING function setting 136
7.5 Troubleshooting immediately after failure occurs 137
7.5.1 After power failure 137
7.5.2 After other abnormality/error 137
7.6 Troubleshooting 138
7.6.1 Indication of "FAILURE" LED (red) 138
7.6.2 Indication of "FAILURE" LED (red) 144
7.6.3 No Indication of the "FAILURE" LED 144
8 MAINTENANCE AND INSPECTION 145
8.1 Maintenance and inspection 145
8.2 Cleaning 146
8.3 Inspecting the deposit 146
8.4 Maintenance 147
8.4.1 Recommended overhaul intervals 147
8.4.2 Standard replacement parts 147
8.4.3 Recommended maintenance intervals for main parts 148
8.5 Transporting for repair or overhaul 149