Edwards STP-iS2207 Series - 9 Storage and Disposal; 9.1 Storage of the STP pump

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 141
7
SAFETY FUNCTIONS
Referred
Section
4.10.1
*1
The driver output stops and the rotor continue rotating by inertia. It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the STP pump.
Table 40 - Error List (continued)
Countermeasures
C
heck the vacuum piping
system for leakage.
C
heck the exhaust sequence.
Turn "OFF" the switch to stop
the pump, and then turn "ON"
the switch again to recover.
Contact Service office.
1.
Perform rotational
operation after resetting.
2.
Contact Service office.
Con
tact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Probable causes
Atmospheric air flows the STP
pump
.
Failure of the
control unit.
1.
Malfunction by external
noise.
2.
Failure of the control unit.
Failure of the
control unit.
Failure of the
control unit.
Failure of the
control unit.
1.
Short-circuit or ground fault
in the motor winding.
2.
Failure of the control unit.
Failure of the
control unit.
Occurrence
condition
R
otational speed
increases
in br
ake
or Levitation state
T
he rotation does
not
stop after 30
min.
into brake
state
Accelerate up to
2000
rpm or less.
C
ommunication
failure
in the
c
ontrol unit
Co
mmunication
failure with m
otor
driver
Abnormal
motor
driver operation
.
Motor driver over
curren
t
Motor driver over
voltage
Pump operation
Free run
*1
Free run
*1
Decelerate and
stop
Decelerate and
stop
D
ecelerate and
stop
D
ecelerate and
stop
Free run
*1
Free run
*1
(Error message)
Aberrant Accel
Aberrant Brake
Accel Malfunction
AMB Com.
Failure
DRV Com.
Failure
DRV Failure
DRV Overcurrent
DRV Ove
rvoltage
"FAILURE"
LED
Steady red