Edwards STP-iS2207 Series - Page 150

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 140
7
SAFETY FUNCTIONS
Referred
Section
3.1.1
2.3
4.1
4.1
4.4.2
4.4
Table 39 - Error List (continued)
Countermeasures
1.
Set the ambient
temperature to 40 °C or less.
2.
Set the cooling water flow
rate at 3 L/min and cooling water temperature
between
15 to 35 ℃.
1.
Set the temperature of the
baking heater to 120 °C or less.
2.
Always cool the STP pump.
3.
Check the piping system
for leakage.
4.
Repetitious start/stop
operations may cause the STP pump to overheat.
Probable causes
1.
High ambient temperature.
2.
Insufficient cooling of the
control unit.
1.
Overheating during baking.
2.
Insufficient cooling.
3.
Leakage of the vacuum
piping system.
4.
Repetitive start/stop
operations.
Occurrence
condition
Overheating
inside the
control
unit
Overheating
inside the STP
pump
Pump operation
D
ecelerate and
stop
D
ecelerate and
stop
(Error message)
CNT Overheat 1,
2
MOTOR
Overheat
"FAILURE"
LED
3 flashes in red