STP-301/451 Series Instruction Manual
5
INTRODUCTION
Thank you very much for purchasing Edwards’ turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust
gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-301/STP-451 turbomolecular pump:
Model Name Specification
• STP-301 High-vacuum type
• STP-451 High-vacuum type
• STP-301C High-vacuum type, chemical specific
*1
• STP-451C High-vacuum type, chemical specific
*1
For the specifications of other models, contact Edwards.
In this manual, the above STP pump series is collectively called the "STP pump".
APPLIED STANDARDS
The STP pump conforms to the following directives and standards:
◇ Applied Directives
• EC Machinery Directive
• EC Electromagnetic Compatibility Directive
• EC Low Voltage Directive
◇ Applied Standards
• EN292-1
• EN292-2
• EN60204-1
• EN61326 (class A)
• EN61000-6-2
◇ Applied Standards (Only a some model)
*2
• UL61010A-1, 2002 (Standard for Electrical Equipment for Laboratory Use; Part 1 :
General Requirements)
*1
: Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)
*2
: Contact Edwards about recognized model