STP-iXA3306 Series Turbomolecular Pump
Imbalance
(1 flash in orange)
Pump Run Time Over
Pump Overload
(2 flashes in orange)
First Damage Limit
Second Damage Limit
(3 flashes in orange)
Corresponding to
warning type
WARNING N.O OUT
between (6)–(24)
WARNING N.C OUT
(6)–(25)
Figure 57 - WARNING output
Note: The WARNING detection cannot be reset by the "RESET" operation.
See Section 7.4, "WARNING function setting" for the releasing the WARNING detection.
The STP pump can operate even when the WARNING is detected.
Overhaul the STP pump when WARNING detection is indicated.
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