STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 108
5
SERIAL COMMUNICATION PROTOCOL
Error message Value Error message Value
[System reservation] 66 [System reservation] 81
[System reservation] 67 [System reservation] 82
[System reservation] 68 [System reservation] 83
[System reservation] 69 [System reservation] 84
[System reservation] 70 [System reservation] 85
[System reservation] 71 [System reservation] 86
Aberrant Brake 72 [System reservation] 87
Aberrant Accel 73 Overspeed 4 88
[System reservation] 74 [System reservation] 89
[System reservation] 75 CNT Overheat 3 90
Inordint Current 76 [System reservation] 91
FAN Trouble 77 [System reservation] 92
Serial Com. Fail 78
*2
[System reservation] 93
[System reservation] 79 WARNING: C/U Restart 94
[System reservation] 80
Table 37 - Error message values (continued)
*1 CAUTION or WARNING message. It is not a state of failure. Refer to Section 7 for details. The STP pump will continue to
operate after one of these messages is displayed. It is recommended that an application be designed with this in
consideration.
*2 When the setting value of serial communication timeout is 0, the error 78 is disabled (not detected).
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