STP-iXA3306 Series Turbomolecular Pump
SERIAL C
OMMUNICATION PROTOCO
L
5.4.15 ReadMeasValue
Function: Reads the TMS temperature, motor temperature, motor current, measured rotational speed,
and control unit temperature. The motor temperature value is the same temperature as
"ReadMotorTemp". The measured rotational speed value is the same as "ReadMeas" parameter 2
(Measured rotational speed).
Transmission frame:
*1 The HEX code of ASCII character ’[’ is "5B".
120-bits hexadecimal
coded ASCII
16-bits hexadecimal
coded ASCII
16-bits hexadecimal
coded ASCII
8-bits hexadecimal
coded ASCII
8-bits hexadecimal
coded ASCII
24-bits hexadecimal
coded ASCII
Measured rotational speed
16-bits hexadecimal
coded ASCII
48-bits hexadecimal
coded ASCII
Control unit temperature
(Unit: °C)
16-bits hexadecimal
coded ASCII