STP-iXA3306 Series Turbomolecular Pump
4.10 Operating the TMS unit (for use with the TMS unit)
4.10.1 Before starting
Check the following items before starting:
1. Check that the TMS heater cable is securely connected to the "X12 HEATER" connector on the
control unit.
2. Check that the TMS valve and the cooling water pipe are securely connected.
4.10.2 Starting/Stopping
Power on the STP pump to automatically start the TMS unit.
Power off the STP pump to automatically stop the TMS unit.
When STP pump is in the power ON state, the TMS unit operates regardless of the status of the STP
pump. When the STP pump is the cause of the malfunction, the TMS unit is stopped.
4.10.3 Setting the TMS unit function
When the temperature of the STP pump base is lower than the setting value, the TMS heater is turned
"ON", and the TMS valve is turned "OFF" to heat the STP pump. When the temperature of the STP
pump base is higher than the setting value, the TMS heater is turned "OFF", and the TMS valve is
turned "ON" to cool the STP pump.
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