STP-iXA3306 Series Turbomolecular Pump
4.3 Baking the STP pump
WARNING
The surfaces of the STP pump and its peripheral equipment will become extremely
hot. Never touch them with bare hands.
CAUTION
The TMS unit and the baking heater cannot be used together at the same time.
To attain a less pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment
and STP pump.
When baking the STP pump, always cool it to prevent overheating.
Start baking after cooling is started.
Set the temperature of the baking heater to 120 °C or less.
DO NOT introduce gases during baking, or this will prevent overheating.
To exhaust the gas discharged from the vacuum equipment and the inner wall of the STP pump, run
the STP pump during baking.
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