Edwards STP-iXA3306C User Manual

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 14
TECHNICAL DATA
PAG
E
14
2
2.2 Maximum gas flow-rate
2.2.1 STP-iXA3306C/CV
Cooling water
backing-pump
Gas
Maximum gas flow-rate
[Pa･m
3
/s]
[SCCM]
15 to 25 ºC
> 1,300 L/min
Ar
2.87
1700
N
2
4.05
2400
> 10,000 L/min
Ar
3.55
2100
N
2
6.76
4000
26 to 35 ºC
> 1,300 L/min
Ar
2.53
1500
N
2
3.72
2200
> 10,000 L/min
Ar
2.87
1700
N
2
6.59
3900
Table 1 - Maximum gas flow-rate (STP-iXA3306C)
Cooling water
backing-pump
Gas
Maximum gas flow-rate
TMS
(setting value)
[Pa･m
3
/s]
[SCCM]
15 to 25ºC
> 1,300 L/min
Ar
2.03
1200
70 ºC
N
2
3.55
2100
> 10,000 L/min
Ar
2.03
1200
N
2
5.07
3000
Table 2 - Maximum gas flow-rate (STP-iXA3306CV)
*1 The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously and the purge gas
flow rate <N
2
> 8.4×10
-2
±1.7×10
-2
Pa•m
3
/s (50±10 SCCM) is used. It is changed depending on condition. For example, when
the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact
Edwards.

Edwards STP-iXA3306C Specifications

General

Brand	Edwards
Model	STP-iXA3306C
Category	Water Pump
Language	English