STP-iXA3306 Series Turbomolecular Pump
3.7 Connecting the water cooling pipe
Secure the connection pipe to prevent water leakage and use cooling water under the conditions
provided in Section 2.3, "Water cooling use condition". It is recommended to connect the water
cooling pipes according to the direction (IN side / OUT side) in Figure 27. Install a secondly
containment for liquids or a water leak detector in the place (ex. cooling water ports) where cooling
water may leak. Figure 27 shows the position of the cooling water ports.
Install the valve to isolate (Lockout/Tagout) cooling water (Lockout/Tagout) at your company.
Figure 27 - Positions of the cooling water port
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