Edwards STP-iXA3306C User Manual

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 52
INSTALLATION
3
3.9.6 Connecting the pump and TMS valve
The control unit is always water-cooled. For (A) Two-way valve type and (B) Three-way valve type in
Figure 30, two water supply lines are required for ON/OFF valve control.
Connect the pump and TMS valve according to Figure 30.
(A) Two-way valve type
(B) Three-way valve type
(C) Three-way valve type
Figure 30 - TMS valve connection
Use cooling water which fulfils the conditions in Section 2.3, “Water cooling use condition”.
Note: When the two-way vale is closed, cooling water circulating whole device will stop.
Note: Procure and connect the cooling water pipe and affix the electromagnetic cooling water valve
at your site. The diameter of the valve is Rc1/4.
Equipment
STP pump
STP pump
Equipment
Control unit
Control unit
ON/OFF
control
ON/OFF
control
Normally
ON
control
Normally
ON
control
STP pump
Equipment
Control unit
ON/OFF
control
Normally
ON
control

Edwards STP-iXA3306C Specifications

General

Brand	Edwards
Model	STP-iXA3306C
Category	Water Pump
Language	English