Edwards STP-iXA3306C User Manual

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 22
INSTALLATION
3
The STP pump should be installed in an area which meets the following requirements:
Ambient temperature
0 to 40 °C (32 to 104 °F)
Ambient relative humidity
30 to 95% (no dew condensing)
Environment
 An area free of externally applied mechanical shock.
 A place free of a heat source (Keep clear of the heat
source or attach a thermal shield plate).
 A place free of a strong magnetic field (Range: up to 15
mT (150 G) in the axial direction, and up to 3 mT (30 G) in
the radial direction with respect to the rotational axis of the
STP pump).
 A place free of a strong electric field.
 A place free of exposure to radiation.
 No discharge of high voltage (more than 500 V) (If more
than 500 V is discharged, contact Edwards).
 Others: An area free of exposure to direct sunlight, high
humidity, dust, salty air, dripping water, explosive or
flammable gas, corrosive gas, excessive vibration and
sources of electric noise.
STP pump installation
equipment conditions
Install the STP pump securely so that foreign materials
cannot fall into the STP pump (Ex.: Si wafers or samples are
positioned above the STP pump) (To prevent foreign
materials from falling into the STP pump, design a shield
plate with large conductance).
Install the STP pump so that the inlet flange of the STP
pump not to be exposed to heat source. (Install the heat
shield plate so as to prevent the effect by radiation heat)
Good example:
Heat shield plate
Bad example:
None
* STP-iXA3306 series is equivalent to the specification of Protection Classification IP54 sealed. This model has protection
against dust and water splashed from any direction. Refer to IEC60529-2001 for details.
Table 5 - Environmental requirements for installation

Edwards STP-iXA3306C Specifications

General

Brand	Edwards
Model	STP-iXA3306C
Category	Water Pump
Language	English