STP-iXA3306 Series Turbomolecular Pump
7.1.8 Overspeed
When the rotational speed of the STP pump exceeds 29,000 rpm due to a failure in the motor driver,
the STP pump changes into free-running and stops.
The "FAILURE" LED (red) illuminates, and a failure signal is output from the "X2 REMOTE"
connector.
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit)
If the temperature of the STP pump base unit is higher than the setting value by 10 ºC (18 ºF) or more
due to the occurrence of an abnormality/error in the TMS heater or other fault, the "FAILURE" LED
illuminates and a failure signal is output from the "X2 REMOTE" connector. The heater is switched
OFF and the cooling water unit is operated. The STP pump decelerates and stops. Continue to
operate the cooling water unit until the temperature of the pump base is reduced at the setting value
after the pump stops.
If the temperature of the STP pump base unit is lower than the setting value by 10 ºC (18 ºF) or more
due to the occurrence of an abnormality/error in the TMS heater or other fault, the "FAILURE" LED
illuminates and a failure signal is output from the "X2 REMOTE" connector.The heater and the cooling
water valve are switched OFF and the STP pump decelerates and stops.
Note: "TMS Lower Temp" is not detected for a certain time when the STP pump starts.
When an abnormality/error occurs in the TMS connection cable, the STP pump decelerates and stops.
The heater and the cooling water unit are switched OFF.
The "FAILURE" LED illuminates and a failure signal is output from the "X2 REMOTE" connector.
To Next Page
Loading...
Need help?
General
