Edwards STP-iXA3306C User Manual

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 157
7
SAFETY FUNCTIONS
Referred
Sec
tion
Table
55 - Error List
(continued)
Countermeasures
1. Contact Service office.
2. Contact Service office.
1. Contact Service office.
2. Connect the cable
securely.
3. Contact Service office.
4. When the TMS
function
is
not in use, set the
"TMS
Option
" to "DISABLE"
with
display
unit
iDT
-001
or
STP
-Link
.
Probable causes
1. Failure of the TMS heater.
2. Failure of the TMS unit.
1. Disconnection of the TMS
sensor.
2. Disconnection of the
external
TMS connection
cable.
3. Failure of the
external
TMS
connectio
n cable.
4. Incorrect setting of the
TMS function.
Occurrence
condition
TMS temperature control error (when the TMS unit
detection
temperature becomes lower than the setting value by 10
°C
(-18 ºF) or more. Error is not detected for a certain time after the
STP pump
starts.
TMS sensor is not connected when the state "TMS Option
" is
"ENABLE"
.
Pump operation
Decelerat
e and
stop
Decelerat
e and
stop
(Error
message
)
TMS Lower Temp
TMS
Sensor Lost
"FAILURE"
LED
Steady
red

Edwards STP-iXA3306C Specifications

General

Brand	Edwards
Model	STP-iXA3306C
Category	Water Pump
Language	English