STP-iXA3306 Series Turbomolecular Pump
SERIAL COMMUNICATION
PROTOCOL
5.4.2 ReadMeas
Function: Reads the measured rotational speed.
Transmission frame:
56-bits hexadecimal
coded ASCII
Measured rotational speed
16-bits hexadecimal
coded ASCII
Example:
Measured rotational speed: 01C2
hex
= 450 Hz = 27,000 rpm
*1 System reservation
5.4.3 Command
Function: Sends the pump operation commands START, STOP and RESET. These commands are
valid only when being sent to the serial port which is set as the input operation port. Refer to Section
Section 5.4.17, "SetOptionFunc" for the setting method of the input operation port.
Transmission frame: