STP-iXA3306 Series Turbomolecular Pump
CONTENTS (CONTINUED)
Section Title Page
3.7 Connecting the water cooling pipe 47
3.8 Attaching a baking heater 48
3.9 Installation of the TMS unit 49
3.9.1 TMS unit specification 49
3.9.2 Configuration of the STP pump with the TMS 50
3.9.3 TMS heater 51
3.9.4 Connecting the TMS heater cable 51
3.9.5 TMS valve 51
3.9.6 Connecting the pump and TMS valve 52
3.10 Connecting to semiconductor equipment 53
3.10.1 Connecting to power 53
3.10.2 Emergency off circuit (EMO circuit) 53
4 OPERATION 55
4.1 Gas pumping, cooling and baking the STP pump 55
4.1.1 Gas pumping 55
4.1.2 How to introduce a purge gas 56
4.2 Cooling the STP pump 56
4.2.1 Water-cooling method 56
4.3 Baking the STP pump 57
4.4 Before starting the STP pump 58
4.4.1 Confirmation before starting 58
4.4.2 Confirmation of vacuum system 58
4.5 Powering ON 59
4.6 Pump operation 59
4.6.1 Input operation port setting 59
4.6.2 Starting/stopping the STP pump 60
4.7 How to start/stop the STP pump 62
4.7.1 Starting the STP pump after stopping 62
4.7.2 Starting the STP pump after a safety function operates 62
4.7.3 Powering OFF 62
4.8 LED 63
4.9 Parallel port input/output signal 64
4.9.1 Input signal pins 64
4.9.2 Input operation port setting 71
4.9.3 Rotation INHIBIT signal 72
4.9.4 Second speed option 73
4.9.5 Output signal pins 74
4.10 Operating the TMS unit (for use with the TMS unit) 78
4.10.1 Before starting 78
4.10.2 Starting/Stopping 78
4.10.3 Setting the TMS unit function 78
To Next Page
Loading...
Need help?
General
