STP-iXA3306 Series Turbomolecular Pump
SERIAL C
OMMUNICATION PROTOCO
L
16-bits hexadecimal
coded ASCII
Serial communication
time out setting (Unit: sec.)
16-bits hexadecimal
coded ASCII
88-bits hexadecimal
coded ASCII
*1 Assign the parameter value the reading data of ReadOptionFunc (?=) or FFFF32003CFFhex.
*2 Assign the parameter value the reading data of ReadOptionFunc (?=) or Fhex.
Refer to Table 41, "Parameter setting value" for each parameter setting value.
The value is not reflected when a parameter is out of a setting range.
Example:
1. Input operation port: 01
hex
= I/O REMOTE
2. TMS Option: FF
hex
= DISABLE
4. Second Damage Limit Option: 00
hex
= ENABLE
5. First Damage Limit Warning: 00
hex
= ENABLE
6. Pump Runtime Over Warning: FF
hex
= DISABLE
7. Pump Runtime Over Warning hours: 000003E8
hex
= 1,000 (×100 hours)
8. Imbalance Warning: 00
hex
= ENABLE
9. Pump Overload Warning: FF
hex
= DISABLE
10. Pump Overload Warning Motor current: 03E8
hex
= 1,000 (×0.1%)
11. Pump Overload Warning Rotational speed: 0000
hex
= 0 (×0.1%)
12. Serial communication time out: 003C
hex
= 60 sec.