STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 27
INSTALLATION
3
3.3 Name and function of each part
3.3.1 Name and function of the pump
The STP pump in Figure 19 is a typical pump model. Refer to Section 2, "TECHNICAL DATA".
Figure 19 - Configuration of the STP pump
Item
Description Function
1 Inlet port flange Connected to the vacuum equipment (at the high vacuum side).
2 Outlet port flange Connected to the inlet port side of the backing-pump.
3 Control unit Contains the electronics that control the pump. Refer to Section
3.3.2, "Name and function of the control unit, for details.
4 Purge port
(only specification with
purge port)
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gas, gas including hydrogen.
Table 3 - Pump functions
1
2
3
4
3
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