Edwards STP-iX457 Series - Vent Valve Connection and Control

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 42
INSTALLATION
3
connection cable is not included with the power supply unit iPD-240-24V (optional accessory).
Contact the distributor when purchasing it.
3.7 Vent valve
3.7.1 Connecting the vent valve
CAUTION
Control the amount of the atmosphere or dry N
2
gas at 8.4×10
-1
Pa・m
3
/s (500 SCCM) or less when
introducing from the vent valve.
The vent valve (optional accessory) provides controlled amounts of gas at atmospheric pressure into
the pump to shorten the stopping time of the STP pump. Connect the vent valve to the purge port
shown in Figure 31.
Figure 32 shows example of a control method when introducing the atmosphere from the primary
side of the vent valve.
When using a vent valve (optional accessory), connect the port A to the low pressure side, and
connect the port B to the high pressure side.
(a) Purge port diameter VCR 1/4 (b) Purge port diameter KF10
Figure 31 - Vent valve connection
Vent
valve
(optional accessory)
Clamper
KF10
VCR 1/4
(male)
VCR1/4
(male)
KF10
X3 OPTION
Clamper