Edwards STP-iX457 Series User Manual

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 8
INTRODUCTION
1
1.7 Operation principle of the STP pump
Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat panel,
solar battery.
The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The STP-iX457/iXU457 series pump is a magnetically-levitated turbomolecular pumps, each with the
following features:
1. Oil free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
(a) STP-iX457 series (b) STP-iXU457 series
1. Rotor blade 4. Radial electromagnet
7. Touch down bearing
2. Stator blade 5. Axial sensor 8.
Control unit
3. Radial sensor 6. Axial electromagnet
Figure 6 - Cross sectional view of the STP pump
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2
4
6
7
3
5
8
7
5
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Edwards STP-iX457 Series Specifications

General

Brand	Edwards
Model	STP-iX457 Series
Category	Water Pump
Language	English