Edwards STP-iX457 Series - Technical Data and Specifications; STP Pump Detailed Specifications

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 11
TECHNICAL DATA
2
2 TECHNICAL DATA
2.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item STP-iX457/iX457C STP-iXU457/iXU457C
Flange size Inlet port flange ICF152
VG100
ISO100
ISO100F
ICF203
VG150
ISO160
ISO160F
ICF152
VG100
ISO100
ISO100F
ICF203
VG150
ISO160
ISO160F
Outlet port flange KF25
Pumping speed N
2
L/s 300 450 300 420
H
2
L/s 300 460 300 410
Compression ratio N
2
>10
8
H
2
1×10
4
Ultimate pressure
Pa (Torr)
Without
anti-corrosive
treatment
ICF 10
-8
(10
-10
)
VG/ISO 6.5×10
-6
(5×10
-8
)
Corrosion
resistant type
ICF 10
-7
(10
-9
)
VG/ISO 6.5×10
-6
(5×10
-8
)
Maximum working pressure
(Natural air)
Pa (Torr) 3.2×10
-1
(2.4×10
-3
)
Maximum backing pressure
*1
(Natural air)
Pa (Torr) 133 (1)
Critical operating backing
pressure
*2
(Natural air)
Pa (Torr) 67 (0.5)
Flow rate of purge gas <N
2
> Pa•m
3
/s
(SCCM)
3.4×10
-2
to 5.1×10
-2
(20 to 30)
Rated speed (Natural air) rpm 55,000
Backup rotational speed
*3
rpm Approximately 24,000
Starting time min
≦8
Stopping time min
≦10
Vibration
μm (0-P)
< 0.005 (at 55,000rpm)
< 0.0001 (at 55,000rpm)
Noise dB < 55 (at 55,000 rpm)
Baking temperature °C <120
Lubricating oil Not necessary