STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 30
INSTALLATION
3
3.4 How to install the STP pump
Install the STP pump to the inside of the vacuum equipment as shown in Figure 21.
WARNING
An appropriate enclosure or a barrier which cannot be removed without using a tool
should be provided to prevent an operator from accessing the connection cables
between the STP pump and its connectors provided.
WARNING
When installing the STP pump and connecting/disconnecting cables, always power
off the primary power (switch the MAIN POWER to "OFF") and isolate
(Lockout/Tagout) the electrical energy source, water and gas, and other energy
sources on the vacuum equipment. Failure to do so may result in the inadvertent
rotation of the STP pump which may result in an accident, an electric shock or
damage to equipment.
Moreover, an accident caused by water leaks or gas leak may occur.
CAUTION
Use a lifter or the like when installing the STP pump to the vacuum equipment. Failure to do so
might hurt your back or cause injuries due to occurrence of an accident such as fall. When lifting
by hands for unavoidable reason, two or more people must always conduct it.
A supportive device such as lifter to installing the STP pump should withstand the load of five times
or more the weight of the STP pump.
*1
Equipment and part within the parentheses must be prepared by the customer.
Figure 21 - Installation of the STP pump to the vacuum equipment
To power supply
unit
DC power cable
To vacuum equipment
Remote operation cable
Inlet port
(Vacuum equipment)
*1
Inlet port flange
(Backing -pump;
dry pump, and other)
*1
Outlet port flange
(Vacuum valve)
(Inside of vacuum equipment)
View from A
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