STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 145
7
SAFETY FUNCTIONS
7.6.2 Indication of "STATUS" LED (green and red alternately)
If an abnormality/error is detected by self test during the power ON operation, "STATUS" LED
illuminates in green and red alternately. This is the indication of STP pump or control unit failure.
Contact Service Office.
7.6.3 No Indication of the "STATUS" LED (red)
No.
Symptom Probable cause Countermeasures
Referred
Section
1 "STATUS" LED
does not
illuminate.
Incorrect connection of
power cable
Connect the power cable correctly. 3.6
Abnormal power voltage
Set the input voltage to the
±10 %.
2.2
Power failure Check whether or not a power failure
has occurred.
7.1.1
2 Green flashing
pattern of
"STATUS" LED
after performing
the start
operation.
Failure of the "Input
Operation Port" setting.
Set the input operation port correctly. 4.8
3 Insufficient
ultimate
pressure.
Failure of the
backing-pump.
Check the capacity and starting state
(use a backing-pump having more
capacity that we specified).
3.8
Leakage of the piping
system.
Check the piping system for leakage. 3.8
Residual molecules. If the main composition is H
2
or H
2
O,
perform baking; if it is other gases, clean
the inside of the vacuum equipment (If
gases remain inside the STP pump,
contact Service office when it is needed
to be cleaned).
4.2
4 Abnormal noise
is generated
while the pump
is rotating
External vibration or
impact
Remove external vibration so as not to
transmit it to the STP pump.
3.1.1
Table 45 - Troubleshooting with no indication of the "STATUS" LED
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